In-line characterization of nanostructured mass-produced polymer components using scatterometry
Research output: Contribution to journal › Journal article › Research › peer-review
Original language | English |
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Article number | 085004 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 27 |
Issue number | 8 |
Number of pages | 8 |
ISSN | 0960-1317 |
DOIs | |
Publication status | Published - 20 Jul 2017 |
Bibliographical note
[Qdev]
- scatterometry, injection molding, metrology, in-line characterization
Research areas
ID: 186155187