Electrical Properties of Selective-Area-Grown Superconductor-Semiconductor Hybrid Structures on Silicon

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We present a superconductor-semiconductor materials system that is both scalable and monolithically integrated on a silicon substrate. It uses selective-area growth of Al-InAs hybrid structures on a planar III-V buffer layer, grown directly on a high-resistivity silicon substrate. We characterize the electrical properties of this materials system at millikelvin temperatures and observe a high average field-effect mobility of mu 3200 cm2/Vs for the InAs channel and a hard induced superconducting gap. Josephson junctions exhibit a high interface transmission, T 0.75, a gate-voltage-tunable switching current with a product of critical current and normal state resistance, ICRN 83 mu V, and signatures of multiple Andreev reflections. These results pave the way for scalable and high-coherence gate-voltage-tunable transmon devices and other superconductor-semiconductor hybrids fabricated directly on silicon.

Original languageEnglish
Article number044015
JournalPhysical Review Applied
Volume16
Issue number4
Number of pages9
ISSN2331-7019
DOIs
Publication statusPublished - 12 Oct 2021

    Research areas

  • ENERGY-GAP STRUCTURE, QUANTUM, SUPERCURRENT, JOSEPHSON, EPITAXY

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