Nanometer-scale scanning sensors fabricated using stencil lithography

Research output: Contribution to journalJournal articlepeer-review

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Nanometer-scale scanning sensors fabricated using stencil lithography. / Champagne, A R; Couture, A J; Kuemmeth, Ferdinand; Ralph, D C.

In: Applied Physics Letters, Vol. 82, No. 7, 01.01.2003, p. 1111.

Research output: Contribution to journalJournal articlepeer-review

Harvard

Champagne, AR, Couture, AJ, Kuemmeth, F & Ralph, DC 2003, 'Nanometer-scale scanning sensors fabricated using stencil lithography', Applied Physics Letters, vol. 82, no. 7, pp. 1111. https://doi.org/10.1063/1.1554483

APA

Champagne, A. R., Couture, A. J., Kuemmeth, F., & Ralph, D. C. (2003). Nanometer-scale scanning sensors fabricated using stencil lithography. Applied Physics Letters, 82(7), 1111. https://doi.org/10.1063/1.1554483

Vancouver

Champagne AR, Couture AJ, Kuemmeth F, Ralph DC. Nanometer-scale scanning sensors fabricated using stencil lithography. Applied Physics Letters. 2003 Jan 1;82(7):1111. https://doi.org/10.1063/1.1554483

Author

Champagne, A R ; Couture, A J ; Kuemmeth, Ferdinand ; Ralph, D C. / Nanometer-scale scanning sensors fabricated using stencil lithography. In: Applied Physics Letters. 2003 ; Vol. 82, No. 7. pp. 1111.

Bibtex

@article{b16d73f7bcf74697a7e0aca1d933764e,
title = "Nanometer-scale scanning sensors fabricated using stencil lithography",
abstract = "We describe a flexible technique for fabricating 10-nm-scale devices for use as high-resolution scanning sensors and functional probes. Metallic structures are deposited directly onto atomic force microscope tips by evaporation through nanoscale holes fabricated in a stencil mask. We report on the lithographic capabilities of the technique and discuss progress in one initial application, to make high-spatial-resolution magnetic force sensors.",
author = "Champagne, {A R} and Couture, {A J} and Ferdinand Kuemmeth and Ralph, {D C}",
year = "2003",
month = jan,
day = "1",
doi = "10.1063/1.1554483",
language = "English",
volume = "82",
pages = "1111",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "7",

}

RIS

TY - JOUR

T1 - Nanometer-scale scanning sensors fabricated using stencil lithography

AU - Champagne, A R

AU - Couture, A J

AU - Kuemmeth, Ferdinand

AU - Ralph, D C

PY - 2003/1/1

Y1 - 2003/1/1

N2 - We describe a flexible technique for fabricating 10-nm-scale devices for use as high-resolution scanning sensors and functional probes. Metallic structures are deposited directly onto atomic force microscope tips by evaporation through nanoscale holes fabricated in a stencil mask. We report on the lithographic capabilities of the technique and discuss progress in one initial application, to make high-spatial-resolution magnetic force sensors.

AB - We describe a flexible technique for fabricating 10-nm-scale devices for use as high-resolution scanning sensors and functional probes. Metallic structures are deposited directly onto atomic force microscope tips by evaporation through nanoscale holes fabricated in a stencil mask. We report on the lithographic capabilities of the technique and discuss progress in one initial application, to make high-spatial-resolution magnetic force sensors.

U2 - 10.1063/1.1554483

DO - 10.1063/1.1554483

M3 - Journal article

VL - 82

SP - 1111

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 7

ER -

ID: 44225772