Scatterometry for optimization of injection molded nanostructures at the fabrication line
Research output: Contribution to journal › Journal article › Research › peer-review
Original language | English |
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Journal | International Journal of Advanced Manufacturing Technology |
Volume | 99 |
Issue number | 9-12, SI |
Pages (from-to) | 2669-2676 |
Number of pages | 8 |
ISSN | 0268-3768 |
DOIs | |
Publication status | Published - 1 Dec 2018 |
Bibliographical note
[Qdev]
- Scatterometry, Injection molding, Nanostructures, Metrology, Process control
Research areas
ID: 210112796