Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
Research output: Contribution to journal › Journal article › Research › peer-review
Original language | English |
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Article number | 031005 |
Journal | Journal of Micro and Nano-Manufacturing |
Volume | 5 |
Issue number | 3 |
ISSN | 2166-0468 |
DOIs | |
Publication status | Published - 7 Jun 2017 |
Bibliographical note
[Qdev]
ID: 186122983