Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics
Research output: Contribution to journal › Journal article › Research › peer-review
Original language | English |
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Article number | 484002 |
Journal | Nanotechnology |
Volume | 26 |
Issue number | 48 |
ISSN | 0957-4484 |
DOIs | |
Publication status | Published - 4 Dec 2015 |
- nanofabrication, plasma etching, photonic crystals, III-V semiconconductors, quantum photonics, integrated optical circuits
Research areas
ID: 153371559