Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics

Research output: Contribution to journal › Journal article › Research › peer-review

Standard

Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics. / Midolo, L.; Pregnolato, T.; Kirsanske, G.; Stobbe, S.

In: Nanotechnology, Vol. 26, No. 48, 484002, 04.12.2015.

Research output: Contribution to journal › Journal article › Research › peer-review

Harvard

Midolo, L, Pregnolato, T, Kirsanske, G & Stobbe, S 2015, 'Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics', Nanotechnology, vol. 26, no. 48, 484002. https://doi.org/10.1088/0957-4484/26/48/484002

APA

Midolo, L., Pregnolato, T., Kirsanske, G., & Stobbe, S. (2015). Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics. Nanotechnology, 26(48), [484002]. https://doi.org/10.1088/0957-4484/26/48/484002

Vancouver

Midolo L, Pregnolato T, Kirsanske G, Stobbe S. Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics. Nanotechnology. 2015 Dec 4;26(48). 484002. https://doi.org/10.1088/0957-4484/26/48/484002

Author

Midolo, L. ; Pregnolato, T. ; Kirsanske, G. ; Stobbe, S. / Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics. In: Nanotechnology. 2015 ; Vol. 26, No. 48.

Bibtex

@article{d0a79ce137a3419b80f0d6fb776ad3a0,
title = "Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics",
keywords = "nanofabrication, plasma etching, photonic crystals, III-V semiconconductors, quantum photonics, integrated optical circuits",
author = "L. Midolo and T. Pregnolato and G. Kirsanske and S. Stobbe",
year = "2015",
month = dec,
day = "4",
doi = "10.1088/0957-4484/26/48/484002",
language = "English",
volume = "26",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "Institute of Physics Publishing Ltd",
number = "48",

}

RIS

TY - JOUR

T1 - Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics

AU - Midolo, L.

AU - Pregnolato, T.

AU - Kirsanske, G.

AU - Stobbe, S.

PY - 2015/12/4

Y1 - 2015/12/4

KW - nanofabrication

KW - plasma etching

KW - photonic crystals

KW - III-V semiconconductors

KW - quantum photonics

KW - integrated optical circuits

U2 - 10.1088/0957-4484/26/48/484002

DO - 10.1088/0957-4484/26/48/484002

M3 - Journal article

C2 - 26552880

VL - 26

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

IS - 48

M1 - 484002

ER -

ID: 153371559