Integration of GaAs waveguides on a silicon substrate for quantum photonic circuits

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We report a method for integrating GaAswaveguide circuits containing self-assembled quantum dots on a Si/SiO2 wafer, using die-to-wafer bonding. The large refractive-index contrast between GaAs and SiO2 enables fabricating single-mode waveguides without compromising the photon-emitter coupling. Anti-bunched emission from individual quantum dots is observed, along with a waveguide propagation loss

OriginalsprogEngelsk
TidsskriftOptics Express
Vol/bind30
Udgave nummer21
Sider (fra-til)37595-37602
Antal sider8
ISSN1094-4087
DOI
StatusUdgivet - 10 okt. 2022

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