Nano-Opto-Electro-Mechanical Systems for Integrated Quantum Photonics
Research output: Chapter in Book/Report/Conference proceeding › Book chapter › Research › peer-review
This chapter covers the topic of nano-opto-electro-mechanical systems (NOEMS) and their application in quantum photonic integrated circuits. When reducing the size of optical devices down to the nano-scale, as in nanophotonics and plasmonics, the properties of confined optical waves become increasingly affected by small geometrical variations of the materials. These variations produce a wide range of electro- and opto-mechanical interactions that do not depend on any intrinsic material property and therefore can be operated at cryogenic temperatures and seamlessly integrated in quantum photonic circuits with embedded quantum emitters and single-photon detectors. We discuss the basic principles of operation of NOEMS, the techniques involved in their fabrication, and the functionalities that such devices can provide toward the realization of scalable quantum photonic integrated technologies.
Original language | English |
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Title of host publication | Photonic Quantum Technologies : Science and Applications |
Number of pages | 17 |
Volume | 2 |
Publisher | Wiley Online Library |
Publication date | 5 May 2023 |
Pages | 581-597 |
ISBN (Print) | 9783527352609 |
ISBN (Electronic) | 9783527837427 |
DOIs | |
Publication status | Published - 5 May 2023 |
Bibliographical note
Publisher Copyright:
© 2023 WILEY-VCH GmbH.
- Electro- and opto-mechanics, Micro and nanofabrication, Photonic integrated circuits, Quantum emitters
Research areas
ID: 389406862