Polarimetric analysis of stress anisotropy in nanomechanical silicon nitride resonators
Research output: Contribution to journal › Journal article › Research › peer-review
Original language | English |
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Article number | 181106 |
Journal | Applied Physics Letters |
Volume | 110 |
Issue number | 18 |
ISSN | 0003-6951 |
DOIs | |
Publication status | Published - 1 May 2017 |
Links
- http://arxiv.org/pdf/1702.01732
Submitted manuscript
ID: 182225071