Read about the Quantech LAB at the Niels Bohr Institute

How to get access to our equipment

Quantech is a Danish Research Infrastructure created to support and foster research and industry in the development of quantum devices. We provide access to state-of-the-art manufacturing and characterization equipment to researchers and industrial partners, engaged in the development of emerging technologies in quantum science and related fields.

About us

Quantum technologies will revolutionize our ability to process and distribute information. It will enable achieving secure communication and tackling problems which we could not solve before, with unprecedented impact in our society.

Quantech is a Danish Research Infrastructure created to support and foster research and industry in the development of quantum devices.

We provide access to state-of-the-art manufacturing and characterization equipment to researchers and industrial partners, engaged in the development of emerging technologies in quantum science and related fields.

Partners and organization

Partners: University of Copenhagen (KU), Technical University of Denmark (DTU), Aarhus University (AU), University of Southern Denmark (SDU).

Funding: Danish Agency for Science, Technology and Innovation by 20 million DKK.

Total budget: 50 million DKK

Project Manager: Leonardo Midolo, Niels Bohr Insitute, University of Copenhagen.

Steering committee members:

Prof. Peter Lodahl, chairman (KU)
Prof. Ulrik Andersen (DTU)
Prof. Sergey Bozhevolnyi (SDU)
Prof. Michael Drewsen (AU)
Jan C. Petersen (Dansk Institut for Fundamental Metrologi, GTS)
Yueqiang Shen (Accelink Denmark A/S)

How to get access

Quantech labs and equipment are open to academic and commercial users. Access to the facilities is granted upon application and according to the following criteria:

Compatibility of the planned activity with the equipment specifications.
Excellence of the proposed activity and relevance within the field of quantum technologies.
Availability of the resources needed to complete the proposed activity.
The project is within the limit of Danish legislation.

To apply, please contact us with a short description of the proposed activity, expected usage of the tools, and number of users.

Pricing information

The tools are subjected to an hourly price rate (per user) and a “reservation” fee.

Prices are calculated according to the type of user (KU-partner, Danish academia, commercial activity) and are subjected to changes over time. Please contact the project coordinator for information about prices for individual tools and rules.

Equipment

Electron Beam Lithography
Name	ELIONIX ELS-F125
Application	Direct exposure of electron-sensitive resists like PMMA, ZEP and HSQ for micro- and nano-patterning down to 7 nm line resolution.
Characteristics	Thermal field emission gun. Acceleration voltages up to 125 kV, probe current up to 300 nA. 100 MHz pattern generator.
Specimen	Maximum size 4 inch
Location	H.C. Ørsted Institutet, Universitetsparken 5, 2100 København Ø.

Scanning Electron Microscope
Name	JEOL 7800F prime
Application	High resolution scanning electron micrographs of wafer/devices during or after processing.
Characteristics	Low voltage scan (0.01 – 30 kV) Magnification: 10x – 1.000.000x Resolution: 0.7 nm between 1 and 15 kV. Gentle beam system
Specimen	Small samples up to 1.5 cm for cross section inspection. Wafers up to 2 inch for top down inspection.
Location	H.C. Ørsted Institutet, Universitetsparken 5, 2100 København Ø.

Dilution refrigerator
Name	BlueFors BF-LD400
Application	Cryogen-free system for experiments and measurements requiring milli-Kelvin thermal environment. System is optimised for quantum opto-mechanics with free-space optical beams.
Characteristics	Base temperature: 7 mK (with blinded viewports) Cooling power at 20 mK: 18 micro-Watts Cooling power at 100 mK: 550 micro-Watts 22h cool-down time. Low-vibration package with cryostat on air-springs. <0.1 nm for f>20Hz.
Customized features	Free space optical access through 2 horizontal transmission lines and 1 vertical input line. Windows AR coated for 1550nm. Optical fibre access, SMF28e+, 1310-1620 nm. Wiring: 6x low-ohmic wires for positioners; 6x wires for scannes; 12x measurement wires. Optional hermetic sample chamber for He exchange gas cooling.
Location	Technical University of Danmark Department of Physics Fysikvej bld. 309-039 Contact person: Ulrich Hoff (ulrich.hoff@fysik.dtu.dk)

Training and technical support

All new users must receive a training session for each tool before being able to book it and use it independently.

Please contact the process engineer Zhe Liu (zhe.liu@nbi.ku.dk) once your application has been approved by the Quantech management board.

It is possible to arrange special sessions with a process engineer (higher fees apply).

Note on Electron Beam Lithography support: Quantech does not offer tools or training for chip design, or calibration of design exposures (e.g. proximity error correction).

Services

We do not typically offer processing or characterization services (i.e. work done by Quantech’s staff on behalf of customers or partners). On only a few occasions and in very special situations we may arrange such services if motivated. In this case, prices will be agreed upon individually and based on the service itself.